High connectivity device stacking

ABSTRACT

The present disclosure generally relates to stacked miniaturized electronic devices and methods of forming the same. More specifically, embodiments described herein relate to semiconductor device spacers and methods of forming the same. The semiconductor device spacers described herein may be utilized to form stacked semiconductor package assemblies, stacked PCB assemblies, and the like.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional of U.S. Nonprovisional patentapplication Ser. No. 16/814,785, filed Mar. 10, 2020, which is hereinincorporated by reference in its entirety.

BACKGROUND Field

Embodiments of the present disclosure generally relate to stackedminiaturized electronic devices and methods of forming the same. Morespecifically, embodiments described herein relate to PCB and packagespacers and methods of forming the same.

Description of the Related Art

Due to an ever-increasing demand for miniaturized electronic deviceswith reduced footprint, electronic devices have evolved into complex2.5D and 3D stacked devices. The evolution of stacked electronic devicedesign has resulted in greater circuit densities in efforts to improvespeed and processing capabilities and has also imposed correspondingdemands on the materials, components, and processes used in thefabrication of such electronic devices.

Conventionally, components of miniaturized electronic devices have beenvertically stacked with spacers disposed between the individual devicecomponents to provide physical separation therebetween. These spacersare typically formed of a molding compound (e.g., epoxy moldingcompound, FR-4 and FR-5 grade woven fiberglass cloth with epoxy resinbinders, and the like) and are patterned via mechanical processes toenable electrical connectivity of the device components. However, thematerials utilized for the molding compound, as well as the patterningprocesses for the spacers, have several limitations that impedeelectronic device scaling and overall device performance.

In particular, as a result of the thermal properties of current moldingcompound materials, coefficient of thermal expansion (CTE) mismatch mayoccur between the device components and adjacent spacers, thusnecessitating larger solder bumps with greater spacing to mitigate anywarpage of the device components or the spacers caused by the CTEmismatch. Furthermore, the intrinsic properties of these moldingcompound materials also cause difficulty in patterning fine (e.g., lessthan 50 μm) features in the spacers, which is magnified by theresolution limitations of the mechanical structuring processesthemselves. Therefore, spacers utilizing conventional molding compoundmaterials may create a bottleneck in the fabrication of stackedminiaturized electronic devices with reduced footprint.

Therefore, what is needed in the art are improved spacers and structuresfor stacked miniaturized electronic devices and methods of forming thesame.

SUMMARY

The present disclosure generally relates to stacked miniaturizedelectronic devices and methods of forming the same. More specifically,embodiments described herein relate to semiconductor device spacers andmethods of forming the same.

In one embodiment, a semiconductor device spacer is provided. Thesemiconductor device spacer includes a frame having a first surfaceopposite a second surface, a frame material including a polymer-baseddielectric material with spherical ceramic fillers, and a via includinga via surface defining an opening extending through the frame from thefirst surface to the second surface. The via has a diameter betweenabout 10 μm and about 150 μm. An electrical interconnection is furtherdisposed within the via on the via surface.

In one embodiment, a semiconductor device assembly is provided. Thesemiconductor device assembly includes a first printed circuit board(PCB) having a first glass fiber reinforced epoxy resin material and afirst electrical distribution layer formed on the first glass fiberreinforced epoxy resin material. The semiconductor device assemblyfurther includes a second PCB having a second glass fiber reinforcedepoxy resin material and a second electrical distribution layer formedon the second glass fiber reinforced epoxy resin material. Thesemiconductor device assembly also includes a device spacer interposedbetween the first PCB and the second PCB to facilitate a physical spacetherebetween. The device spacer includes a frame having a first surfaceopposite a second surface, a frame material including a polymer-baseddielectric material with spherical ceramic fillers, and a via includinga via surface defining an opening extending through the frame from thefirst surface to the second surface. The via has a diameter betweenabout 10 μm and about 150 μm. An electrical interconnection is furtherdisposed within the via on the via surface to form at least part of aconductive path extending between at least a portion of the first andsecond electrical distribution layers.

In one embodiment, a semiconductor device assembly is provided. Thesemiconductor device assembly includes a printed circuit board (PCB)having a first glass fiber reinforced epoxy resin material and a firstelectrical distribution layer formed on the first glass fiber reinforcedepoxy resin material. The semiconductor device assembly further includesa silicon substrate having a silicon cure structure with a thicknessless than about 1000 μm and a second electrical distribution layerformed on the silicon core structure. The semiconductor device assemblyalso includes a device spacer interposed between the PCB and the siliconsubstrate to facilitate a physical space therebetween. The device spacerincludes a frame having a first surface opposite a second surface and athickness between about 400 μm and about 1600 μm, a frame materialincluding a polymer-based dielectric material with spherical ceramicfillers, and a via including a via surface defining an opening extendingthrough the frame from the first surface to the second surface. Thethickness of the frame is substantially similar to a height of thephysical space and the via has a diameter between about 10 μm and about150 μm. An electrical interconnection is further disposed within the viaon the via surface to form at least part of a conductive path extendingbetween at least a portion of the first and second electricaldistribution layers. A ratio of an area of the device spacer relative toan area of a surface of the PCB or the silicon substrate is betweenabout 0.15 and about 0.85.

BRIEF DESCRIPTION OF THE DRAWINGS

So that the manner in which the above recited features of the presentdisclosure can be understood in detail, a more particular description ofthe disclosure, briefly summarized above, may be had by reference toembodiments, some of which are illustrated in the appended drawings. Itis to be noted, however, that the appended drawings illustrate onlyexemplary embodiments and are therefore not to be considered limiting ofits scope, and may admit to other equally effective embodiments.

FIGS. 1A and 1B schematically illustrate cross-sectional views ofsemiconductor device spacers, according to embodiments described herein.

FIG. 1C illustrates an enlarged cross-sectional view of a portion of asemiconductor device spacer, according to embodiments described herein.

FIGS. 2A and 2B schematically illustrate cross-sectional views ofsemiconductor device spacers, according to embodiments described herein.

FIGS. 3A and 3B schematically illustrate top-down views of semiconductordevice spacers, according to embodiments described herein.

FIG. 4 is a flow diagram that illustrates a process for fabricating thesemiconductor device spacers of FIGS. 1-3B, according to embodimentsdescribed herein.

FIGS. 5A-5J schematically illustrate cross-sectional views of asemiconductor device spacer at different stages of the process depictedin FIG. 4 , according to embodiments described herein.

FIG. 6 is a flow diagram that illustrates a process for fabricating aframe for utilization in a semiconductor device spacer, according toembodiments described herein.

FIGS. 7A-7E schematically illustrate cross-sectional views of a frame atdifferent stages of the process depicted in FIG. 6 , according toembodiments described herein.

FIG. 8 schematically illustrates a cross-sectional view of a stackedsemiconductor device, according to embodiments described herein.

FIG. 9 schematically illustrates a cross-sectional view of a stackedsemiconductor device, according to embodiments described herein.

FIG. 10 schematically illustrates a cross-sectional view of a stackedsemiconductor device, according to embodiments described herein.

FIGS. 11A-11E schematically illustrate top views of semiconductor devicespacer arrangements, according to embodiments described herein.

To facilitate understanding, identical reference numerals have beenused, where possible, to designate identical elements that are common tothe Figures. It is contemplated that elements and features of oneembodiment may be beneficially incorporated in other embodiments withoutfurther recitation.

DETAILED DESCRIPTION

The present disclosure generally relates to stacked miniaturizedelectronic devices and methods of forming the same. More specifically,embodiments described herein relate to semiconductor device spacers andmethods of forming the same. The semiconductor device spacers describedherein may be utilized to form stacked semiconductor package assemblies,stacked PCB assemblies, and the like.

The stacked semiconductor devices and semiconductor device spacersdisclosed herein are intended to replace more conventional semiconductorPCB and package assemblies utilizing spacers fabricated from moldingcompound materials (e.g., epoxy molding compound, FR-4 and FR-5 gradewoven fiberglass cloth with epoxy resin binders, and the like).Generally, the scalability of stacked PCBs and package assemblies islimited in part by the intrinsic properties of the molding compoundmaterials utilized to form these spacers. For example, the rigidity ofthese materials causes difficulty in patterning fine (e.g., micronscale) features in the spacers for interconnectivity of the individualdevice components within a stacked assembly. Furthermore, as a result ofthe thermal properties of currently-utilized molding compound materials,coefficient of thermal expansion (CTE) mismatch may occur between thespacers and any device components disposed adjacent thereto. Therefore,current PCB and package assemblies necessitate larger solder bumps withgreater spacing to mitigate the effect of any warpage caused by CTEmismatch. Accordingly, conventional semiconductor PCB and packageassemblies are characterized by low through-structure electricalbandwidths resulting in decreased overall power and efficiency. Themethods and apparatus disclosed herein provide semiconductor devicespacers that overcome many of the disadvantages associated withconventional PCB and package assemblies described above.

FIGS. 1A-1C, 2A, and 2B illustrate cross-sectional views of asemiconductor device spacer 100 according to some embodiments. Thesemiconductor device spacer 100 may be utilized for physical separation,structural support, and electrical interconnection of semiconductordevices and components mounted thereto. The semiconductor device spacer100 may also be employed for stacking semiconductor packagingsubstrates, thus enabling economical space utilization in smallelectronic products and/or enhanced I/O connections and bandwidthbetween multiple packaging substrates. The semiconductor device spacer100 also minimizes track length between different inter-operating partsto shorten routing of interconnections between substrates.

The semiconductor device spacer 100 generally includes a frame 102having one or more holes or vias 103 formed therethrough. In oneembodiment, the frame 102 is formed of polymer-based dielectricmaterials. For example, the frame 102 is formed from a flowable build-upmaterial. In further embodiments, the frame 102 is formed of an epoxyresin material having ceramic fillers 130 (shown in FIG. 1C), such assilica (SiO₂) particles. Other examples of ceramic fillers 130 that maybe utilized to form the frame 102 include aluminum nitride (AlN),aluminum oxide (Al₂O₃), silicon carbide (SiC), silicon nitride (Si₃N₄),Sr₂Ce₂Ti₅O₁₆, zirconium silicate (ZrSiO₄), wollastonite (CaSiO₃),beryllium oxide (BeO), cerium dioxide (CeO₂), boron nitride (BN),calcium copper titanium oxide (CaCu₃Ti₄O₁₂), magnesium oxide (MgO),titanium dioxide (TiO₂), zinc oxide (ZnO) and the like.

The ceramic fillers 130 are generally spherical in shape or morphologyas depicted in the enlarged cross-sectional view of the frame 102 inFIG. 1C. As utilized herein, the term “spherical” refers to any round,ellipsoid, or spheroid shape. For example, in some embodiments, theceramic fillers 130 may have an elliptic shape, an oblong oval shape, orother similar round shape. However, other morphologies are alsocontemplated. In some examples, the ceramic fillers 130 utilized to formthe frame 102 include particles ranging in diameter between about 40 nmand about 150 nm, such as between about 80 nm and about 100 nm. Forexample, the ceramic fillers 130 include particles ranging in diameterbetween about 200 nm and about 800 nm, such as between about 300 nm andabout 600 nm. In some examples, the ceramic fillers 130 includeparticles having a substantially uniform diameter. In other examples,the ceramic fillers 130 include particles differing in diameter. Theparticles of the ceramic fillers 130 have a packing density (e.g.,fraction of the solid volume of the frame 102 made up by the volume ofthe ceramic fillers 130) between about 0.02 and about 0.99, such as apacking density between about 0.1 and about 0.98. For example, theceramic fillers 130 in the frame 102 may have a packing density betweenabout 0.2 and about 0.96, such as a packing density between about 0.5and about 0.95.

The frame 102 may have any desired morphology and dimensions. In someembodiments, the frame 102 has a polygonal morphology. For example, theframe 102 has a substantially rectangular shape with lateral dimensionsbetween about 5 mm and about 100 mm, such as between about 10 mm andabout 80 mm, for example between about 15 mm and about 50 mm. Generallythe frame 102 has a thickness T₀ between about 45 μm and about 5000 μm,such as a thickness T₀ between about 100 μm and about 3000 μm. Forexample, the frame 102 has a thickness T₀ between about 200 μm and about2000 μm, such as a thickness T₀ between about 400 μm and about 1600 μm.

In some embodiments, the frame 102 is formed of one or more layers 110of polymer-based dielectric materials that are laminated and curedtogether to form a single, integral body (e.g., block) for the frame102. For example, the frame 102 is formed of stacked individual layers110 a-c that are laminated and cured together to form a single, integralbody. In such an example, the thickness T₀ of the frame 102 is the sumof the thicknesses T_(A-C) of the individual layers 110 a-110 c,respectively. Each individual layer 110 a-110 c utilized for the frame102 has a thickness T_(A-B) between about 10 um and about 150 um, suchas between about 25 um and about 125 um, for example between about 50 umand about 100 um.

The holes or vias 103 (hereinafter referred to as “vias”) are formed inthe frame 102 to enable conductive electrical interconnections 104 to berouted through the frame 102. For example, the vias 103 extend from afirst surface 105 of the frame 102 to an opposing second surface 107.Generally, the one or more vias 103 are substantially cylindrical inshape. However, other suitable morphologies for the vias 103 are alsocontemplated. The vias 103 may be formed as singular and isolated vias103 through the frame 102 or in one or more groupings or arrays. In oneembodiment, the vias 103 have a minimum pitch P₀ less than about 1200μm, such as a minimum pitch P₀ between about 50 μm and about 1000 μm,such as between about 100 μm and about 800 μm. For example, the minimumpitch P₀ is between about 150 μm and about 600 μm. For clarity, “pitch”refers to the distance between centers of adjacent vias 103.

In the embodiment depicted in FIG. 1A, each of the one or more vias 103has a substantially uniform diameter through the frame 102. For example,each of the one or more vias 103 has a uniform diameter V₁ less thanabout 500 μm throughout, such as a uniform diameter V₁ between about 10μm and about 200 μm throughout. In a further example, each of the vias103 has a uniform diameter V₁ between about 10 μm and about 180 μmthroughout, such as a uniform diameter V₁ between about 10 μm and about150 μm throughout.

Alternatively, in the embodiment depicted in FIG. 1B, each of the one ormore vias 103 has a tapering diameter through the frame 102. Forexample, each of the one or more vias has a first diameter V_(1A) at afirst surface 105 that widens or expands to a second diameter V_(1B) ata second surface 107. Thus, it may be said that each via 103 tapers fromthe diameter V_(1B) to the diameter V_(1A). In one example, the diameterV_(1B) is less than about 500 μm, such between about 10 μm and about 200μm, such as between about 10 μm and about 180 μm, such as between about10 μm and about 150 μm. In one example, the diameter V_(1A) is less thanabout 400 μm, such as between about 10 μm and about 130 μm, such asbetween about 10 μm and about 120 μm, such as between about 10 μm andabout 100 μm.

The vias 103 provide channels through which one or more electricalinterconnections 104 are formed in the semiconductor device spacer 100.In one embodiment, the vias 103 and the electrical interconnections 104are formed through the entire thickness T₀ of the semiconductor devicespacer 100 (i.e. from the first surface 105 to the second surface 107 ofthe semiconductor device spacer 100). For example, the electricalinterconnections 104 have a longitudinal length L corresponding to thethickness T₀ of the semiconductor device spacer 100 between about 45 μmand about 5000 μm, such as a longitudinal length L between about 100 μmand about 3000 μm. In one example, the electrical interconnections 144have a longitudinal length L between about 200 μm and about 2000 μm,such as a longitudinal length L between about 400 μm and about 1600 μm.In another embodiment, the vias 103 and/or electrical interconnections104 are only formed through a portion of the thickness T₀ of thesemiconductor device spacer 100. In further embodiments, the electricalinterconnections 104 protrude from one or more surfaces of thesemiconductor device spacer 100, such as the surfaces 105, 107 asdepicted in FIGS. 1A and 1B. The electrical interconnections 104 areformed of any conductive materials used in the field of microelectronicdevices, integrated circuits, circuit boards, and the like. For example,the electrical interconnections 104 are formed of a metallic material,such as copper, aluminum, gold, nickel, silver, palladium, tin, or thelike.

In the embodiments depicted in FIGS. 1A-2B, the electricalinterconnections 104 fill the vias 103. However, in some embodiments,the electrical interconnections 104 only line the surfaces of thesidewalls 113 of the vias 103 and do not fully fill (e.g., completelyoccupy) the vias 103. Thus, the interconnections 104 may have hollowcores therethrough.

Furthermore, in FIGS. 1A and 1B, the electrical interconnections 104have a diameter equal to the diameter of the vias 103 in which they areformed. In further embodiments, such as depicted in FIGS. 2A and 2B, thesemiconductor device spacer 100 further includes an adhesion layer 112and/or a seed layer 114 formed thereon for electrical isolation of theelectrical interconnections 104. In one embodiment, the adhesion layer112 is formed on surfaces of the semiconductor device spacer 100adjacent to the electrical interconnections 104, including the sidewalls113 of the vias 103. Thus, as depicted in FIGS. 2A and 2B, theelectrical interconnections 104 have a diameter less than the diameterof the vias 103 in which they are formed. For example, in FIG. 2A, theelectrical interconnections have a uniform diameter V₂ less than thediameter V₁ of the vias 103. In FIG. 2B, the electrical interconnectionshave a first diameter V_(2A) less than the diameter V_(1A) that tapersto a second diameter V_(2B) less than a diameter V_(1B).

The adhesion layer 112 is formed of any suitable materials, includingbut not limited to titanium, titanium nitride, tantalum, tantalumnitride, manganese, manganese oxide, molybdenum, cobalt oxide, cobaltnitride, silicon nitride and the like. In one embodiment, the adhesionlayer 112 has a thickness between about 10 nm and about 300 nm, such asbetween about 50 nm and about 150 nm. For example, the adhesion layer112 has a thickness between about 75 nm and about 125 nm, such as about100 nm.

The optional seed layer 114 comprises a conductive material, includingbut not limited to copper, tungsten, aluminum, silver, gold, or anyother suitable materials or combinations thereof. The seed layer 114 isformed on the adhesion layer 112 or directly on the sidewalls 113 of thevias 103 (on the frame 102). In one embodiment, the seed layer 114 has athickness between about 50 nm and about 2000 nm, such as between about100 nm and about 1000 nm. For example, the seed layer 112 has athickness between about 150 nm and about 800 nm, such as about 500 nm.

FIGS. 3A and 3B illustrate schematic top-down views of the semiconductordevice spacer 100 with exemplary arrangements of vias 103 formedtherein. As described above, the vias 103 are generally cylindrical inshape and thus, appear circular in FIGS. 3A and 3B. Other morphologiesfor the vias 103, however, are also contemplated. FIGS. 3A and 3Bfurther depict the adhesion layer 112 and the seed layer 114 formedwithin each via 103. The adhesion layer 112 is formed on the sidewalls113 of each via 103 and the seed layer 114 is formed on the adhesionlayer 112. However, in some embodiments, the interconnections 104 may beformed through the vias 103 without the utilization of the adhesionlayer 112 and/or the seed layer 114. In other embodiments, the seedlayer 114 may be formed on the sidewalls 113 of the vias 103 without theutilization of the adhesion layer 112 prior to formation of theinterconnections 104.

The vias 103 are formed in any suitable arrangement and number throughthe frame 102. As depicted in FIG. 3A, six vias 103 are formed throughthe frame 102 in a linear arrangement having two columns and three rowsof vias 103, wherein the vias 103 in each column and in each row arealigned with one another. A first pitch P₁ is depicted between adjacentvias 103 aligned in each row, a second pitch P₂ is depicted betweenadjacent vias 103 aligned in each column, and a third pitch P₃ isdepicted between adjacent and diagonal vias 103 across the two columns.At least two of the pitches P₁, P₂, or P₃ may be different from oneanother in length.

FIG. 3B illustrates an alternative arrangement also having two columnsand three rows of vias 103, wherein only the vias 103 in each column arealigned. Accordingly, the pitch between all adjacent vias 103 issubstantially the same in length, represented in FIG. 3B by the pitchP₁. As described above, “pitch” refers to the distance between centersof adjacent vias 103. Although two arrangements of vias 103 aredepicted, FIGS. 3A and 3B are only exemplary and any suitable number andarrangement of vias 103 may be formed in the frame 102 of thesemiconductor device spacer 100.

FIG. 4 illustrates a flow diagram of a representative method 400 offorming a semiconductor device spacer 500. The method 400 has multipleoperations 402-416 The method may include one or more additionaloperations which are carried out before any of the defined operations,between two of the defined operations, or after all of the definedoperations (except where the context excludes the possibility). FIGS.5A-5J schematically illustrate cross-sectional views of a semiconductordevice spacer 500 at various stages of the method 400 represented inFIG. 4 . Therefore, FIG. 4 and FIGS. 5A-5J are herein described togetherfor clarity.

The method 400 beings at optional operation 402 and corresponding FIG.5A, wherein one or more protective films 501 are removed from each oftwo or more device spacer precursor layers 510 a, 510 b. The precursorlayers 510 a, 510 b act as building blocks for formation of the frame102 of the semiconductor device spacer 500 and thus, the precursorlayers 510 a, 510 b are formed of a polymer-based dielectric material asdescribed above with reference to the frame 102. For example, theprecursor layers 510 a, 510 b are formed of flowable build-up materials.In one embodiment, the precursor layers 510 a, 510 b are formed of aceramic-filler-containing epoxy resin, such as an epoxy resin filledwith (e.g., containing) silica (SiO₂) particles. Other examples ofceramic fillers 130 that may be utilized in the precursor layers 510 a,510 b include aluminum nitride (AlN), aluminum oxide (Al₂O₃), siliconcarbide (SiC), silicon nitride (Si₃N₄), Sr₂Ce₂Ti₅O₁₆, zirconium silicate(ZrSiO₄), wollastonite (CaSiO₃), beryllium oxide (BeO), cerium dioxide(CeO₂), boron nitride (BN), calcium copper titanium oxide (CaCu₃Ti₄O₁₂),magnesium oxide (MgO), titanium dioxide (TiO₂), zinc oxide (ZnO) and thelike. Generally, each precursor layer 510 a, 510 b has a thickness T_(L)less than about 150 μm, such as a thickness T_(L) between about 10 μmand about 150 μm, such as between about 25 μm and about 125 μm, forexample between about 50 μm and about 100 μm. Any suitable amount ofprecursor layers 510 a, 510 b may utilized during the method 400 to forma semiconductor device spacer 100 having any desired dimensions.

In some embodiments, each precursor layer 510 a, 510 b is coupled to oneor more protective films 501 that are configured to protect theprecursor layers 510 a, 510 b during handling and storage thereof. Thus,at operation 402, the one or more protective films 501 are removed fromeach precursor layer 510 a, 510 b to expose one or more major surfacesof each precursor layer 510. As depicted in FIG. 5A, a single protectivefilm 501 is removed from each of the two precursor layers 510 a, 510 bto expose surfaces 505, 507 thereof for coupling of the precursor layers510 a, 510 b at operation 404.

At operation 404, the one or more precursor layers 510 are coupledtogether (e.g., placed against one another) at the exposed surfacesthereof and laminated. Coupling and lamination of the surfaces 505, 507of the precursor layers 510 a, 510 b is depicted in FIGS. 5B and 5C.Upon placement of the precursor layers 510 a, 510 b together, a vacuumpressure is applied to draw out any air captured between the majorsurfaces 505, 507 during the coupling thereof, as shown in FIG. 5B.Accordingly, at least a portion of operation 404 may be carried out in avacuum laminator or vacuum bonder or any other suitable vessel forapplication of vacuum pressure. In one embodiment, the vacuum pressureis ramped up to about 1 hPa or less during an interval (e.g., timeperiod) between about 10 seconds and about 90 seconds, such as aninterval between about 30 seconds and about 60 seconds, such as aninterval of about 45 seconds. Upon reaching a desired vacuum pressurelevel, the vacuum pressure may be maintained for an interval betweenabout 50 seconds and 300 seconds, such as an interval between about 100seconds and 200 seconds. In one example, the vacuum pressure ismaintained at about 1 hPa or less for an interval of about 150 secondsto ensure removal of any air gaps between the precursor layers 510.During the application of vacuum pressure, the temperature is maintainedwithin a range between about 60° C. and about 100° C., such as betweenabout 70° C. and about 90° C. For example, the temperature is maintainedat about 80° C. during the application of vacuum pressure at operation404.

In FIG. 5C, the coupled precursor layers 510 a, 510 b are fused (e.g.,laminated) together by application of pressure upon one or more outersurfaces of the precursor layers 510 a, 510 b. In one embodiment, asingle-sided pressure is applied to the coupled precursor layers 510 a,510 b as the coupled precursor layers 510 a, 510 b are supported upon asupporting diaphragm or platen (e.g., platform) (not shown). Forexample, pressure may be applied to a single side 517 of the coupledprecursor layers 510 a, 510 b as the coupled precursor layers 510 a, 510b are supported by a platen on an opposing side 515. In otherembodiments, a double-sided pressure is applied to the coupled precursorlayers 510 a, 510 b. For example, pressure is applied to both sides 515,517 by mechanical devices, such as a mechanical press or vice, or bypneumatic devices, such as pneumatic devices using compressed air. Insome embodiments, lamination of the precursor layers 510 a, 510 b iscarried out in the same vessel as the application of vacuum depicted inFIG. 5B. For example, lamination is carried out in a vacuum laminator orvacuum bonder.

During the lamination of the precursor layers 510 a, 510 b, atemperature is maintained within a range between about 50° C. and about150° C., such as between about 75° C. and about 125° C., such as about100° C. Exposing the precursor layers 510 a, 510 b to elevatedtemperatures may soften the precursor layers 510 a, 510 b and promoteadhesion therebetween. In some embodiments, a pressure applied to theprecursor layers 510 a, 510 b during lamination is between about 0.3kg/cm² and about 1 kg/cm², such as between about 0.4 kg/cm² and about0.8 kg/cm², such as about 0.5 kg/cm² or about 0.6 kg/cm².

Upon completion of operation 404, the operations 402 and 404 may berepeated to couple and fuse additional precursor layers 510 to thealready fused precursor layers 510 a, 510 b, or the fused precursorlayers 510 a, 510 b may be exposed to a cure process at operation 406 toform a frame 502 in preparation for further structuring. For example,one or more additional precursor layers 510 may be coupled to and fusedwith the side 515 and/or the side 517 of the fused precursor layers 510a, 510 b until a desired thickness of precursor material (correspondingto a final thickness of the frame 102) is achieved. Thus, one or moreremaining protective films 501 coupled to the fused precursor layers 510a, 510 b are removed therefrom in preparation for the attachment ofadditional precursor layers 510, in addition to any protective films 501coupled to the additional precursor layers 510 themselves. As depictedin FIG. 5D, a single protective film 501 is removed from the side 517 ofthe fused precursor layers 510 a, 510 b in preparation for the couplingof a third precursor layer 510 c thereto.

In other examples, a protective film 501 is removed from each side 515,517 of the fused precursor layers 510 a, 510 b in preparation for thecoupling of an additional third and fourth precursor layer (not shown)to the sides 515, 517 of the fused precursor layers 510 a, 510 b. Thus,the number of protective films 501 removed from the fused precursorlayers 510 a, 510 b may be dependent upon the number of additionalprecursor layers 510 to be added thereto. If no additional precursorlayers 510 are desired to be added to the fused precursor layers 510 a,510 b and the fused precursor layers 510 a, 510 b are ready for curing,one or more protective films 501 coupled to both sides 515, 517 may beremoved before exposure of the fused precursor layers 510 a, 510 b tothe cure process at operation 406 depicted in FIG. 5E.

At operation 406, the fused precursor layers 510 a, 510 b are exposed tothe cure process to partially or fully cure (i.e., harden throughchemical reactions and cross-linking) the polymer-based dielectricmaterial of the fused precursor layers 510 a, 510 b and form the frame502. In some embodiments, the cure process is performed at hightemperatures to fully cure the frame 502. In further embodiments, thecure process is performed at or near ambient (e.g., atmospheric)pressure conditions. During the cure process, the fused precursor layers510 a, 510 b are placed on a first platen 520 a within a vacuum oven,vacuum bonder, vacuum laminator or any other suitable vessel forapplication of vacuum pressure. The first platen 520 a includes ananti-stick layer 522 disposed on a side thereof that is configured tocontact and support the fused precursor layers 510 a, 510 b duringcuring. The anti-stick layer 522 is formed of any suitable non-stickmaterials having a low roughness value such as Teflon, PDMS, polyimide,fluorinated ethylene propylene, and the like.

Upon placement of the fused precursor layers 510 a, 510 b on the firstplaten 520 a, a temperature and pressure within the vacuum chamber isramped up to a first curing pressure of about 0.001 hPa and a firstcuring temperature of about 110° C. For example, the first curingpressure within the vacuum chamber is ramped up to between about 0.001hPa and about 10 hPa, such as between about 0.001 hPa and about 1 hPa.In one example, the first curing temperature within the vacuum chamberis ramped up to between about 60° C. and about 110° C., such as betweenabout 100° C. and about 110° C. Ramping of the temperature and/or thepressure within the vacuum chamber may be carried out over an intervalbetween about 15 minutes and about 45 minutes, such as an intervalbetween about 20 minutes and about 40 minutes. In one example, thetemperature and/or pressure are ramped up over an interval of about 30minutes upon placement of the fused precursor layers 510 a, 510 b on thefirst platen 520 a.

Upon reaching a desired first curing temperature and/or first curingpressure within the vacuum chamber, a second platen 520 b is pressedagainst a side of the fused precursor layers 510 a, 510 b opposite thefirst platen 520 a to clamp or secure the fused precursor layers 510 a,510 b in place. Similar to the first platen 520 a, the second platen 520b also includes an anti-stick layer 522 disposed on a side thereof thatis configured to contact the fused precursor layers 510 a, 510 b. Oncethe fused precursor layers 510 a, 510 b are secured between the twoplatens 520 a, 520 b, the fused precursor layers 510 a, 510 b are heldin place for an interval between about 45 minutes and about 75 minutesand at the first curing temperature and first curing pressure. Forexample, the fused precursor layers 510 a, 510 b may be held between thetwo platens 520 a, 520 b at a temperature of about 110° C. and apressure of about 0.01 MPa for a period of about 60 minutes.

In some embodiments, after holding the fused precursor layers 510 a, 510b between the two platens 520 a, 520 b for a desired amount of time atthe first curing temperature and the first curing pressure, the firstcuring temperature is again ramped up to a second curing temperaturewhile the first curing pressure is maintained. For example, the firstcuring temperature is ramped up again to a second curing temperaturebetween about 150° C. and about 180° C., such as between about 170° C.and about 180° C. In one example, the second curing temperature is about180° C. The fused precursor layers 510 a, 510 b may then be held betweenthe two platens 520 a, 520 b at the second curing temperature and thefirst curing pressure for an interval between about 15 minutes and about45 minutes, such as between 20 minutes and about 40 minutes, such asabout 30 minutes. After exposing the fused precursor layers 510 a, 510 bto the second curing temperature, the curing process may be completedand the cured frame 502 is cooled and removed from the platens 520 a,520 b.

At operation 408 and FIG. 5F, the cured frame 502 is exposed to a laserablation process (e.g., direct laser patterning) to form one or morevias 503 therein. Any suitable laser ablation system may be utilized toform the one or more vias 503. In some examples, the laser ablationsystem utilizes an infrared (IR) laser source. In some examples, thelaser source is a nanosecond or picosecond ultraviolet (UV) laser. Inother examples, the laser is a femtosecond UV laser. In still otherexamples, the laser source is a femtosecond green laser.

The laser source of the laser ablation system generates a continuous orpulsed laser beam for patterning of the frame 502. For example, thelaser source generates a pulsed laser beam having a frequency between 5kHz and 1000 kHz, such as between 10 kHz and about 200 kHz, such asbetween 15 kHz and about 100 kHz. In one embodiment, the laser source isconfigured to deliver a pulsed laser beam at a wavelength between about200 nm and about 1200 nm and a pulse duration between about 10 ns andabout 5000 ns with an output power between about 10 Watts and about 100Watts. In one embodiment, the laser source is configured to deliver apulsed laser beam at fluctuating time intervals. For example, the lasersource delivers one or more rounds of pulses having between about 1pulse and about 20 pulses with time delays therebetween. Pulse-timingfluctuations may reduce the overall thermal impact of the laser beam onthe formation of the vias 503 and any other features in the frame 502.Generally, the laser source is configured to form any desired pattern ofvias 503 in the frame 502, such as individual vias 503 or arrays of vias503.

In some embodiments, the vias 503 are formed having substantiallyuniform diameters throughout lengths thereof (for example, between afirst surface 424 and a second surface 527 of the frame 502). The vias503 of uniform diameters may be formed by first piercing a hole into theframe 502 with a laser beam generated by the laser source and thenmoving the laser beam in a spiraling (e.g., circular, corkscrew) motionrelative to the central axis of each of the vias 503. The laser beam mayalso be angled using a motion system to form the uniform vias 503. Inother embodiments, the vias 503 are formed having a tapering diametersthroughout lengths thereof. The tapering of vias 503 may be formed byusing the same method described above, or by pulsing the laser beamgenerated by the laser source at a single location in the frame 502continuously.

After formation of the vias 503, the cured and patterned frame 502 isexposed to a de-smear process. During the de-smear process, any unwantedresidues and/or debris caused by laser ablation during the formation ofthe vias 503 are removed therefrom. The de-smear process thus cleans thevias 503 for subsequent metallization. In one embodiment, the de-smearprocess is a wet de-smear process. Any suitable solvents, etchants,and/or combinations thereof are utilized for the wet de-smear process.In one example, methanol is utilized as a solvent and copper (II)chloride dihydrate (CuCl₂·H₂O) as an etchant. Depending on the residuethickness, exposure duration of the frame 502 to the wet de-smearprocess is varied. In another embodiment, the de-smear process is a dryde-smear process. For example, the de-smear process is a plasma de-smearprocess with an O₂/CF₄ mixture gas. The plasma de-smear process mayinclude generating a plasma by applying a power of about 700 W andflowing O₂:CF₄ at a ratio of about 10:1 (e.g., 100:10 sccm) for a timeperiod between about 60 seconds and about 120 seconds. In furtherembodiments, the de-smear process is a combination of wet and dryprocesses.

Following the de-smear process, the frame 502 is ready for formation ofconductive interconnections therein. At optional operation 410 andcorresponding FIG. 5G, an adhesion layer 512 and/or a seed layer 514 areformed on the frame 502. The adhesion layer 512 is formed on desiredsurfaces of the frame 502, such as surfaces 525, 527 as well assidewalls 513 of the vias 503, to assist in promoting adhesion andblocking diffusion of the subsequently formed seed layer 514 andelectrical interconnections 504. Thus, in one embodiment, the adhesionlayer 512 acts as an adhesion layer; in another embodiment, the adhesionlayer 512 acts as a barrier layer. In both embodiments, however, theadhesion layer 512 will be described as an “adhesion layer.”

In one embodiment, the adhesion layer 512 is formed of titanium,titanium nitride, tantalum, tantalum nitride, manganese, manganeseoxide, molybdenum, cobalt oxide, cobalt nitride, silicon nitride, or anyother suitable materials or combinations thereof. In one embodiment, theadhesion layer 512 has a thickness between about 10 nm and about 300 nm,such as between about 50 nm and about 150 nm. For example, the adhesionlayer 512 has a thickness between about 75 nm and about 125 nm, such asabout 100 nm. The adhesion layer 512 is formed by any suitabledeposition process, including but not limited to chemical vapordeposition (CVD), physical vapor deposition (PVD), plasma enhanced CVD(PECVD), atomic layer deposition (ALD), or the like.

The seed layer 514 may be formed on the adhesion layer 512 or directlyon the frame 502 (e.g., without the formation of the adhesion layer512). In some embodiments, the seed layer 514 is formed on all surfacesof the frame 502 while the adhesion layer 512 is only formed on desiredsurfaces or desired portions of surfaces of the frame 502. For example,the adhesion layer 512 is formed on the surfaces 525, 527 and not on thesidewalls 513 of the vias 503 while the seed layer 514 is formed on thesurfaces 525, 527 as well as sidewalls 513 of the vias 503. The seedlayer 514 is formed of a conductive material such as copper, tungsten,aluminum, silver, gold, or any other suitable materials or combinationsthereof. In one embodiment, the seed layer 514 has a thickness betweenabout 0.05 μm and about 0.5 μm, such as a thickness between about 0.1 μmand about 0.3 μm. For example, the seed layer 514 has a thicknessbetween about 0.15 μm and about 0.25 μm, such as about 0.2 μm. In oneembodiment, the seed layer 514 has a thickness between about 0.1 μm andabout 1.5 μm.

Similar to the adhesion layer 512, the seed layer 514 is formed by anysuitable deposition process, such as CVD, PVD, PECVD, ALD dry processes,wet electroless plating processes, or the like. In one embodiment, acopper seed layer 514 is formed on a molybdenum adhesion layer 512 onthe frame 502. The molybdenum adhesion and copper seed layer combinationenables improved adhesion with the surfaces of the frame 502 and reducesundercut of conductive interconnect lines during a subsequent seed layeretch process.

At operation 412, corresponding to FIG. 5H, a spin-on/spray-on or dryresist film 550, such as a photoresist, is applied over surfaces 525,527 of the frame 502 and subsequently patterned. In one embodiment, theresist film 550 is patterned via selective exposure to UV radiation. Inone embodiment, an adhesion promoter (not shown) is applied to the frame502 prior to formation of the resist film 550. The adhesion promoterimproves adhesion of the resist film 550 to the frame 502 by producingan interfacial bonding layer for the resist film 550 and by removing anymoisture from the surface of the frame 502. In some embodiments, theadhesion promoter is formed of bis(trimethylsilyl)amine orhexamethyldisilizane (HMDS) and propylene glycol monomethyl etheracetate (PGMEA).

Upon application of the resist film 550, the frame 502 is exposed to aresist film development process. The development of the resist film 550results in exposure of the vias 503 (shown in FIG. 5H), which may nowhave an adhesion layer 512 and/or a seed layer 514 formed thereon. Inone embodiment, the film development process is a wet process, such as awet process that includes exposing the resist film 550 to a solvent. Inone embodiment, the film development process is a wet etch processutilizing an aqueous etch process. For example, the film developmentprocess is a wet etch process utilizing a buffered etch processselective for a desired material. Any suitable wet solvents orcombination of wet etchants are used for the resist film developmentprocess.

At operation 414 and FIG. 5I, electrical interconnections 504 are formedthrough the exposed vias 503 and the resist film 550 is thereafterremoved. The interconnections 504 are formed by any suitable methods,including electroplating and electroless plating. In one embodiment, theresist film 550 is removed via a wet process. As depicted in FIG. 5I,the electrical interconnections 504 completely fill the vias 503 andprotrude from the surfaces 525, 527 of the frame 502 upon removal of theresist film 550. In some embodiments, the electrical interconnections504 only line the sidewalls 513 of the vias 503 without completelyfilling the vias 503. In one embodiment, the electrical interconnections504 are formed of copper. In other embodiments, the electricalinterconnections 504 are formed of any suitable conductive materialincluding but not limited to aluminum, gold, nickel, silver, palladium,tin, or the like.

At operation 416 and FIG. 5J, the frame 502 having electricalinterconnections 504 formed therein is exposed to a seed layer etchprocess to remove the exposed adhesion layer 512 and/or seed layer 514on external surfaces thereof (e.g., surfaces 525, 527). Upon completionof the seed layer etch process at operation 416, the frame 502 is readyto be utilized as a semiconductor device spacer 500. In someembodiments, the adhesion layer 512 and/or seed layer 514 formed betweenthe electrical interconnections 504 and the sidewalls 513 of the vias503 remain after the seed layer etch process. In one embodiment, theseed layer etch is a wet etch process including a rinse and drying ofthe frame 502. In one embodiment, the seed layer etch process is abuffered etch process selective for a desired material such as copper,tungsten, aluminum, silver, or gold. In other embodiments, the etchprocess is an aqueous etch process. Any suitable wet etchant orcombination of wet etchants are used for the seed layer etch process.

As discussed above, FIG. 4 and FIGS. 5A-5J illustrate a representativemethod 400 for forming a semiconductor device spacer 500. FIG. 6 andFIGS. 7A-7E illustrate an alternative method 600 for forming the frame502 at operation 406. The method 600 generally includes five operations602-610, and optional operation 602 (corresponding to FIG. 7A) issubstantially similar to operation 402 of the method 400. Thus, method600 will be described starting with operation 604 for clarity.

Accordingly, after peeling of protective films 501 from the precursorlayers 510 a, 510 b, the precursor layers 510 a, 510 b are laminatedtogether at operation 604 and FIG. 7B. Similar to operation 404, theprecursor layers 510 a, 510 b are placed against one another at exposedsurfaces 505, 507 thereof, after which a vacuum pressure is applied todraw out any air captured between the coupled surfaces 505, 507. In oneembodiment, the precursor films 510 a, 510 b are exposed to a vacuumpressure between about 0.001 hPa and about 100 hPa. For example, theprecursor films 510 a, 510 b are exposed to a vacuum pressure betweenabout 0.001 hPa and about 10 hPa, such as a vacuum pressure betweenabout 0.001 hPa and about 1 hPa. The vacuum pressure is applied for aninterval between about 10 seconds and about 60 seconds, such as aninterval between about 15 seconds and about 45 seconds, such as about 30seconds. During application of vacuum pressure, the temperature ismaintained within a range between about 60° C. and about 100° C., suchas between about 70° C. and about 90° C., such as about 80° C.

After exposing the precursor films 510 a, 510 b to a vacuum pressure,the precursor films 510 a, 510 b are laminated together by applicationof a positive pressure to one of more outer surfaces of the precursorlayers 510 a, 510 b. As described above, the applied pressure may besingle-sided or double-sided and applied by mechanical or pneumaticprocesses. In one embodiment, a pressure between about 0.3 and about 1kg/cm² is applied to one or more outer surfaces of the precursor layers510 a, 510 b. For example, the precursor films 510 a, 510 b are exposedto a positive pressure between about 0.3 and about 0.8 kg/cm², such as apressure of about 0.5 kg/cm². The positive pressure is applied for aninterval between about 10 seconds and about 60 seconds, such as aninterval between about 15 seconds and about 45 seconds, such as about 30seconds. During the application of positive pressure, the temperature ismaintained within a range between about 60° C. and about 100° C., suchas between about 70° C. and about 90° C., such as about 80° C.

After fusing the precursor layers 510 a, 510 b together, the precursorlayers 510 a, 510 b are then laminated to a substrate 620 at operation606 and FIG. 7C. The substrate 620 is any suitable type of substratehaving an anti-stick layer 622 disposed on a side thereof that isconfigured to contact and support the fused precursor layers 510 a, 510b. In some embodiments, the substrate 620 comprises a metal or ceramicmaterial and has a thickness between about 0.5 mm and about 1 mm. Forexample, the substrate 620 has a thickness between about 0.6 mm andabout 0.8 mm, such as about 0.7 mm or about 0.75 mm. In someembodiments, the lateral dimensions of the substrate 620 exceed thedimensions of the precursor layers 510 a, 510 b such that an entirelateral area of the precursor layers 510 a, 510 b is supported upon thesubstrate 620. The anti-stick layer 622 is formed of any suitablenon-stick materials having a low roughness value, such as Teflon, PDMS,polyimide, fluorinated ethylene propylene, and the like.

Similar to operation 604, lamination of the fused precursor layers 510a, 510 b to the substrate 620 includes coupling the fused precursorlayers 510 a, 510 b to the anti-stick layer 622 and exposing theprecursor layers 510 a, 510 b and substrate 620 to vacuum followed by apositive pressure. In one embodiment, the vacuum pressure is betweenabout 0.001 hPa and about 100 hPa. For example, the coupled precursorfilms 510 a, 510 b and substrate 620 are exposed to a vacuum pressurebetween about 0.001 hPa and about 10 hPa, such as a vacuum pressurebetween about 0.001 hPa and about 1 hPa. The vacuum pressure is appliedfor an interval between about 10 seconds and about 60 seconds, such asan interval between about 15 seconds and about 45 seconds, such as about30 seconds. During application of vacuum pressure, the temperature ismaintained within a range between about 60° C. and about 120° C., suchas between about 70° C. and about 110° C., such as about 80° C.

After vacuum, a positive pressure is applied to one of more outersurfaces of the coupled precursor layers 510 a, 510 b and/or thesubstrate 620. In one embodiment, the positive pressure is between about0.3 and about 1 kg/cm², such as between about 0.4 and about 0.8 kg/cm²,such as a pressure of about 0.5 kg/cm². The positive pressure is appliedfor an interval between about 10 seconds and about 60 seconds, such asan interval between about 15 seconds and about 45 seconds, such as about30 seconds. During the application of positive pressure, the temperatureis maintained within a range between about 60° C. and about 120° C.,such as between about 70° C. and about 110° C., such as about 80° C.

Upon completion of operation 606, the operations 602 and 604 may berepeated to couple and fuse additional precursor layers 510 to theprecursor layers 510 a, 510 b already fused together with the substrate620, or the precursor layers 510 a, 510 b may be exposed to a cureprocess at operation 608 and FIG. 7D to form the frame 502. Prior to thecure process, any remaining protective films 501 on the fused precursorlayers 510 a, 510 b are removed therefrom. In one embodiment, the cureprocess at operation 608 includes exposing the fused precursor layers510 a, 510 b and substrate 620 to a constant temperature between about150° C. and about 200° C. for an interval between about 15 minutes andabout 90 minutes. For example, the fused precursor layers 510 a, 510 band the substrate 620 are exposed to a temperature of about 180° C. foran interval of about 30 minutes.

In another embodiment, the cure process includes exposing the fusedprecursor layers 510 a, 510 b and the substrate 620 to a variabletemperature. For example, the fused precursor layers 510 a, 510 b andthe substrate 620 are exposed to a first temperature between about 80°C. and about 120° C. for an interval between about 45 minutes and about75 minutes, followed by exposure to a second temperature between about160° C. and about 200° C. for an interval between about 15 minutes andabout 45 minutes. For example, the fused precursor layers 510 a, 510 band the substrate 620 are exposed to a first temperature of about 100°C. for an interval of about 60 minutes, followed by exposure to a secondtemperature of about 180° C. for an interval of about 30 minutes. Aftercuring, the cured precursor frame 502 is removed from the substrate 620for further structuring at operation 610 and FIG. 7E.

The semiconductor device spacers 100, 500 may be utilized in anysuitable stacked PCB assembly, stacked package assembly, or othersuitable stacked electronic device. In one exemplary embodiment depictedin FIG. 8 , two semiconductor device spacers 100 are utilized within aPCB assembly 800. As shown, the semiconductor device spacers 100 aredisposed between two PCB's 850 a, 850 b and are configured to positionthe first PCB 850 a relative to the second PCB 850 b such that aphysical space 820 remains between the first PCB's 850 a, 850 b whilethey are conductively connected through the semiconductor device spacers100. Accordingly, the semiconductor device spacers 100 prevent the PCB's850 a, 850 b from contacting one another, and thus, reduce the risk ofshorting thereof. Additionally, interposition of the semiconductordevice spacers 100 between the PCB's 850 a, 850 b may assure proper andeasy placement of the PCB's 850 a, 850 b relative to one another,enabling proper alignment of contacts and holes therebetween.Furthermore, the interposition of the semiconductor device spacers 100between adjacent PCB's 850 a, 850 b reduces the risk of overheating andburning of the PCB's 850 a, 850 b since the facilitation of the physicalspace 820 reduces the amount of heat trapped therebetween. Although onlytwo PCBs 850 a, 850 b are shown in FIG. 8 , it is contemplated thesemiconductor device spacers 100 may be utilized to stack andinterconnect two or more PCB's in parallel.

The PCB's 850 a, 850 b are formed of any suitable dielectric material.For example, the PCB's 850 a, 850 b are formed of a glass fiberreinforced epoxy resin (e.g., FR-1, FR-2, FR-4, halogen-free FR-4, highT_(g) FR-4, and FR-5). Other suitable examples of dielectric materialsinclude resin copper-clad (RCC), polyimide, polytetrafluoroethylene(PTFE), CEM-3, and the like. The PCB's 850 a, 850 b may be single-sidedor double-sided circuit boards. In some embodiments, at least one of thePCB's 850 a, 850 b includes an electrical distribution layer 870 formedthereon and conductively connected with interconnections 104 of thesemiconductor device spacers 100. For example, as depicted in FIG. 8 ,both PCB's 850 a, 850 b include electrical distribution layers 870 a,870 b formed thereon and adjacent the physical space 820, respectively.The electrical distribution layers 870 a, 870 b are formed of anysuitable conductive material such as copper, tungsten, aluminum, silver,gold, or any other suitable materials or combinations thereof. Eachelectrical distribution layer 870 a, 870 b has a thickness between about40 μm and about 100 μm, such as a thickness between about 60 μm andabout 80 μm. For example, each electrical distribution layer 870 a, 870b has a thickness of about 70 μm. The electrical distribution layers 870a, 870 b may have similar or different thicknesses relative to oneanother. Furthermore, although two electrical distribution layers 870 a,870 b are depicted, each PCB 850 a, 850 b may have more or fewerelectrical distribution layers formed on surfaces thereof. In otherembodiments, the PCB's 850 a, 850 b include conductive pads or othersuitable electrical contacts for interconnection through thesemiconductor device spacers 100.

The PCB's 850 a, 850 b are conductively coupled to the semiconductordevice spacers 100 by one or more solder bumps 840 disposed between theelectrical contacts of the PCB's 850 a, 850 b (e.g., electricaldistribution layers 870 a, 870 b) and the interconnections 104 of thesemiconductor device spacers 100. In one embodiment, the solder bumps840 are formed of a substantially similar material to that of theinterconnections 104 and/or the electrical distribution layers 870 a,870 b. For example, the solder bumps 840 are formed of a conductivematerial such as copper, tungsten, aluminum, silver, gold, or any othersuitable materials or combinations thereof. Generally, the solder bumps840 have a height B less than about 50 μm, such as a height B betweenabout 5 μm and about 45 μm, such as a height B between about 10 μm andabout 30 μm. For example, the solder bumps 840 have a height B about 20μm. Altogether, the semiconductor device spacers 100 with the solderbumps 840 create the physical space 820 with a height S between about 95μm and about 5040 μm. Generally, the physical space 820 has a height Ssubstantially similar to a thickness of the frame 102 of thesemiconductor device spacers 100.

In one embodiment, the solder bumps 840 include C4 solder bumps. In afurther embodiment, the solder bumps 840 include C2 (Cu-pillar with asolder cap) solder bumps. Utilization of C2 solder bumps may enablesmaller pitch lengths and improved thermal and/or electrical propertiesfor the PCB assembly 800. The solder bumps 840 are formed by anysuitable bumping processes, including but not limited to electrochemicaldeposition (ECD) electroplating, and metal diffusion bonding (e.g., goldto gold).

In one embodiment, voids between the semiconductor device spacers 100and the PBC's 850 a, 850 b are filled with an encapsulation material 848to enhance the reliability of the solder bumps 840 disposed therein. Theencapsulation material 848 is any suitable type of encapsulant orunderfill and substantially surrounds the solder bumps 840. In oneexample, the encapsulation material 848 includes a pre-assemblyunderfill material, such as a no-flow underfill (NUF) material, anonconductive paste (NCP) material, and a nonconductive film (NCF)material. In one example, the encapsulation material 848 includes apost-assembly underfill material, such as a capillary underfill (CUF)material and a molded underfill (MUF) material. In one embodiment, theencapsulation material 848 includes a low-expansion-filler-containingresin, such as an epoxy resin filled with (e.g., containing) SiO₂, AlN,Al₂O₃, SiC, Si₃N₄, Sr₂Ce₂Ti₅O₁₆, ZrSiO₄, CaSiO₃, BeO, CeO₂, BN,CaCu₃Ti₄O₁₂, MgO, TiO₂, ZnO and the like.

In another exemplary embodiment depicted in FIG. 9 , the semiconductordevice spacers 100 are utilized in a PCB assembly 900. The PCB assembly900 is substantially similar to PCB assembly 800, but includes asubstrate 950 in place of one of the PCB's 850 a, 850 b described above.Thus, the semiconductor device spacers 100 may be utilized tointerconnect and stack a single PCB 850 with the substrate 950. Althoughonly a single PCB 850 and a single substrate 950 are shown in FIG. 9 ,it is contemplated the semiconductor device spacers 100 may be utilizedto stack and interconnect any quantity and combination of PCB's 850and/or substrates 950 in parallel. In some embodiments, two or moresubstrates 950 may be stacked and interconnected without the inclusionof a PCB 850.

The substrate 950 is any suitable type of substrate for use withelectronic devices. In one embodiment, the substrate 950 is configuredto function as a core structure for a semiconductor package, aninterposer, an intermediate bridging connector, a PCB spacer, a chipcarrier, or the like. Accordingly, the substrate 950 is formed of anysuitable substrate material including but not limited to a III-Vcompound semiconductor material, silicon, crystalline silicon (e.g.,Si<100> or Si<111>), silicon oxide, silicon germanium, doped or undopedsilicon, doped or undoped polysilicon, silicon nitride, quartz, glassmaterial (e.g., borosilicate glass), sapphire, alumina, and/or ceramicmaterial. In one embodiment, the substrate 950 is a monocrystallinep-type or n-type silicon substrate. In one embodiment, the substrate 950is a multicrystalline p-type or n-type silicon substrate. In anotherembodiment, the substrate 950 is a p-type or an n-type silicon solarsubstrate.

In further embodiments, the substrate 950 further includes an optionalpassivating layer 905 formed on desired surfaces thereof, such as anoxide passivating layer 905. For example, the substrate 950 may includea silicon oxide passivating layer 905 formed on substantially allsurfaces thereof and thus, the passivating layer 905 substantiallysurrounds the substrate 950. The passivating layer 905 provides aprotective outer barrier for the substrate 950 against corrosion andother forms of damage. In some examples, the passivating layer 905 has athickness between about 100 nm and about 3 μm, such as a thicknessbetween about 200 nm and about 2.5 μm. In one example, the passivatinglayer 905 has a thickness between about 300 nm and about 2 μm, such as athickness of about 1.5 μm.

The substrate 950 may further have a polygonal or circular shape. Forexample, the substrate 950 includes a substantially square siliconsubstrate having lateral dimensions between about 140 mm and about 180mm, with or without chamfered edges. In another example, the substrate950 includes a circular silicon containing wafer having a diameterbetween about 20 mm and about 700 mm, such as between about 100 mm andabout 500 mm, for example about 300 mm. Unless otherwise noted,embodiments and examples described herein are conducted on substrates950 having a thickness between about 50 μm and about 1000 μm, such as athickness between about 90 μm and about 780 μm. For example, thesubstrate 950 has a thickness between about 100 μm and about 300 μm,such as a thickness between about 110 μm and about 200 μm.

In some embodiments, the substrate 950 is a patterned substrate andincludes one or more vias 903 formed therein to enable conductiveelectrical interconnections 904 to be routed therethrough. The vias 903are formed as singular and isolated vias 903 through the substrate 950or in one or more groupings or arrays, as depicted in FIG. 9 . In oneembodiment, a minimum pitch between each via 903 is less than about 1000μm, such as between about 25 μm and about 200 μm. For example, the pitchbetween vias 903 is between about 40 μm and about 150 μm.

Generally, the one or more vias 903 are substantially cylindrical inshape. However, other suitable morphologies for the vias 903 are alsocontemplated. In one embodiment, the vias 903 and thus anyinterconnections 904 formed therein, have a diameter less than about 500μm, such as a diameter less than about 250 μm. For example, the vias 903and/or the interconnections 904 have a diameter between about 25 μm andabout 100 μm, such as a diameter between about 30 μm and about 60 μm. Inone embodiment, the vias 903 and/or the interconnections 904 have adiameter of about 40 μm.

In one embodiment, the vias 903 and/or the interconnections 904 areformed through the entire thickness of the substrate 950. For example,the vias 903 and/or the interconnections 904 have a longitudinal lengthcorresponding to a total thickness of the substrate 950 between about 50μm and about 1000 μm, such as a longitudinal length between about 200 μmand about 800 μm. In one example, the vias 903 and/or theinterconnections 904 have a longitudinal length of between about 400 μmand about 600 μm, such as longitudinal length of about 500 μm. Inanother embodiment, the vias 903 and/or the interconnections 904 areonly formed through a portion of the thickness of the substrate 950. Infurther embodiments, the interconnections 904 protrude from one or moresurfaces of the substrate 950, as depicted in FIG. 9 . Similar to theinterconnections 104, the interconnections 904 are formed of anyconductive materials used in the field of microelectronic devices,integrated circuits, circuit boards, and the like. For example, theinterconnections 904 are formed of a metallic material, such as copper,aluminum, gold, nickel, silver, palladium, tin, or the like.

In some embodiments, the substrate 950 further includes an adhesionlayer 912 and/or a seed layer 914 formed over desired surfaces of thesubstrate 950 upon which the interconnections 904 are formed. Forexample, the adhesion layer 912 and/or the seed layer 914 are formed onthe sidewalls 913 of the vias 903. Generally, the adhesion layer 912and/or the seed layer 914 are substantially similar in material andmorphology to the adhesion layers 112, 512 and the seed layers 114, 514.In some embodiments, the adhesion layer 912 and/or the seed layer 914are formed over the passivating layer 905, which is formed over thesidewalls 913 of the vias 903.

In some embodiments, the substrate 950 further includes one or moreoptional electrical distribution layers 970 disposed on desired surfacesthereof. In FIG. 9 , the electrical distribution layer 970 is disposedon a surface adjacent the physical space 820, opposite the optionalelectrical distribution layer 870, and in contact with theinterconnections 904. The electrical distribution layer 970 is formed ofany suitable conductive material such as copper, tungsten, aluminum,silver, gold, or any other suitable materials or combinations thereof.In further embodiments, the substrate 950 may include conductive pads orother suitable electrical contacts for interconnection with the PCB 850through the semiconductor device spacers 100.

In another exemplary embodiment depicted in FIG. 10 , the semiconductordevice spacers 100 are utilized in a PCB assembly 1000. The PCB assembly1000 is substantially similar to PCB assembly 900, but includes asemiconductor core assembly 1050 in place of the substrate 950 describedabove. Thus, the semiconductor device spacers 100 may be utilized tointerconnect and stack a single PCB 850 with the semiconductor coreassembly 1050. Although only a single PCB 850 and a single semiconductorcore assembly 1050 are shown in FIG. 10 , it is contemplated thesemiconductor device spacers 100 may be utilized to stack andinterconnect any quantity and combination of PCB's 850 and/orsemiconductor core assemblies 1050 in parallel. In some embodiments, twoor more semiconductor core assemblies 1050 may be stacked andinterconnected without the inclusion of a PCB 850.

The semiconductor core assembly 1050 may be utilized for structuralsupport and electrical interconnection of semiconductor packages. Inother examples, the semiconductor core assembly 1050 may be utilized asa carrier structure for a surface-mounted device, such as a chip orgraphics card. The semiconductor core assembly 1050 generally includes acore structure 1002, an optional passivating layer 1005, and aninsulating layer 1016.

In one embodiment, the core structure 1002 includes a patterned (e.g.,structured) substrate formed of any suitable substrate material. Forexample, the core structure 1002 includes a substrate formed from any ofthe materials described above with reference to substrate 950. Thesubstrate utilized to form the core structure 1002 may further have apolygonal or circular shape. For example, the core structure 1002includes a substantially square silicon substrate having lateraldimensions between about 120 mm and about 180 mm, with or withoutchamfered edges. In another example, the core structure 1002 includes acircular silicon-containing wafer having a diameter between about 20 mmand about 700 mm, such as between about 100 mm and about 50 mm, forexample about 300 mm. Unless otherwise noted, embodiments and examplesdescribed herein are conducted on substrates having a thickness betweenabout 50 μm and about 1000 μm, such as a thickness between about 90 μmand about 780 μm. For example, the substrate utilized for the corestructure 1002 has a thickness between about 100 μm and about 300 μm,such as a thickness between about 110 μm and about 200 μm.

Similar to the substrate 950, the core structure 1002 further includesone or more core vias 1003 formed therein to enable conductiveelectrical interconnections to be routed through the core structure1002. The core vias 1003 are formed as singular and isolated core vias1003 through the core structure 1002 or in one or more groupings orarrays. In one embodiment, a minimum pitch between each core via 1003 isless than about 1000 μm, such as between about 25 μm and about 200 μm.For example, the pitch is between about 40 μm and about 150 μm. In oneembodiment, the one or more core vias 1003 have a diameter less thanabout 500 μm, such as a diameter less than about 250 μm. For example,the core vias 1003 have a diameter between about 25 μm and about 100 μm,such as a diameter between about 30 μm and about 60 μm. In oneembodiment, the core vias 1003 have a diameter of about 40 μm.

The optional passivating layer 1005 is similar to the passivating layer905 and is formed on one or more surfaces of the core structure 1002,including the one or more sidewalls 1013 of the core vias 1003. In oneembodiment, the passivating layer 1005 is formed on substantially allexterior surfaces of the core structure 1002 such that the passivatinglayer 1005 substantially surrounds the core structure 1002. In oneembodiment, the passivating layer 1005 is formed of an oxide film orlayer, such as a thermal oxide layer. For example, the passivating layer1005 may be a silicon oxide layer. In some examples, the passivatinglayer 1005 has a thickness between about 100 nm and about 3 μm, such asa thickness between about 200 nm and about 2.5 μm. In one example, thepassivating layer 1005 has a thickness between about 300 nm and about 2μm, such as a thickness of about 1.5 μm.

The insulating layer 1016 is formed on one or more surfaces of the corestructure 1002 or the passivating layer 1005 and substantially encasesthe passivating layer 1005 and/or the core structure 1002. Thus, theinsulating layer 1016 extends into the core vias 803 and coat thepassivating layer 1005 formed on the sidewalls 1013 thereof or directlycoat the core structure 1002. In one embodiment, the insulating layer1016 has a thickness from an outer surface of the core structure 1002 orthe passivating layer 1005 to an adjacent outer surface of theinsulating layer 1016 that is less than about 50 μm, such as a thicknessless than about 20 μm. For example, the insulating layer 1016 hasthickness between about 5 μm and about 10 μm.

In one embodiment, the insulating layer 1016 is formed of polymer-baseddielectric materials, similar to the frame 102 of semiconductor devicespacers 100. For example, the insulating layer 1016 is formed from aflowable build-up material. Accordingly, although hereinafter referredto as an “insulating layer,” the insulating layer 1016 may also bedescribed as a dielectric layer. In a further embodiment, the insulatinglayer 1016 is formed of an epoxy resin material having a ceramic filler,such as silica (SiO₂) particles. Other examples of ceramic fillers thatmay be utilized to form the insulating layer 1016 include aluminumnitride (AlN), aluminum oxide (Al₂O₃), silicon carbide (SiC), siliconnitride (Si₃N₄), Sr₂Ce₂Ti₅O₁₆, zirconium silicate (ZrSiO₄), wollastonite(CaSiO₃), beryllium oxide (BeO), cerium dioxide (CeO₂), boron nitride(BN), calcium copper titanium oxide (CaCu₃Ti₄O₁₂), magnesium oxide(MgO), titanium dioxide (TiO₂), zinc oxide (ZnO) and the like. In someexamples, the ceramic fillers utilized to form the insulating layer 1016have particles ranging in diameter between about 40 nm and about 1.5 μm,such as between about 80 nm and about 1 μm. For example, the ceramicfillers have particles with a diameter between about 200 nm and about800 nm, such as between about 300 nm and about 600 nm. In someembodiments, the ceramic fillers include particles having a diameterless than about 10% of the width or diameter of adjacent core vias 1003in the core structure 1002, such as a diameter less than about 5% of thewidth or diameter of the core vias 1003.

One or more through-assembly vias 1023 are formed through the insulatinglayer 1016 where the insulating layer 1016 extends into the core vias1003 to enable electrical interconnections 1004 to be routedtherethrough. For example, the through-assembly vias 1023 are centrallyformed within the core vias 1003 having the insulating layer 1016disposed therein. Accordingly, the insulating layer 1016 forms one ormore sidewalls of the through-assembly vias 1023, wherein thethrough-assembly vias 1023 have a diameter lesser than the diameter ofthe core vias 1003. In one embodiment, the through-assembly vias 1023have a diameter less than about 100 μm, such as less than about 75 μm.For example, the through-assembly vias 1023 have a diameter less thanabout 50 μm, such as less than about 35 μm. In one embodiment, thethrough-assembly vias 1023 have a diameter of between about 25 μm andabout 50 μm, such as a diameter of between about 35 μm and about 40 μm.

In one embodiment, the interconnections 1004, and thus thethrough-assembly vias 1023 and the core vias 1003, are formed throughthe entire thickness of the semiconductor core assembly 1050. Forexample, the interconnections 1004 and/or the through-assembly vias 1023and/or the core vias 1003 have a longitudinal length corresponding to atotal thickness of the semiconductor core assembly 1050 between about 50μm and about 1000 μm, such as a longitudinal length between about 200 μmand about 800 μm. In one example, the interconnections 1004 and/or thethrough-assembly vias 1023 and/or the core vias 1003 have a longitudinallength of between about 400 μm and about 600 μm, such as longitudinallength of about 500 μm. In another embodiment, the interconnections 1004and/or the through-assembly vias 1023 and/or the core vias 1003 are onlyformed through a portion of the thickness of the semiconductor coreassembly 1050. In further embodiments, the interconnections 1004protrude from one or more surfaces of the semiconductor core assembly1050, as depicted in FIG. 10 . Similar to the interconnections describedabove, the interconnections 1004 are formed of any conductive materialsused in the field of integrated circuits, circuit boards, chip carriers,and the like. For example, the electrical interconnections 1004 areformed of a metallic material, such as copper, aluminum, gold, nickel,silver, palladium, tin, or the like.

In some embodiments, the semiconductor core assembly 1050 furtherincludes an adhesion layer 1012 and/or a seed layer 1014 formed ondesired surfaces of the insulating layer 1016 upon which theinterconnections 1004 are formed. For example, the adhesion layer 1012and/or the seed layer 1014 are formed on the sidewalls of thethrough-assembly vias 1003. Generally, the adhesion layer 1012 and/orthe seed layer 1014 are substantially similar in material and morphologyto the adhesion layers 112, 512 and the seed layers 114, 514.

In some embodiments, the semiconductor core assembly 1050 furtherincludes one or more optional electrical distribution layers 1070disposed on desired surfaces thereof. In FIG. 10 , the electricaldistribution layer 1070 is disposed on a surface adjacent the physicalspace 820, opposite the optional electrical distribution layer 870, andin contact with the interconnections 1004 and solder bumps 840. Theelectrical distribution layer 1070 are formed of any suitable conductivematerial such as copper, tungsten, aluminum, silver, gold, or any othersuitable materials or combinations thereof. In further embodiments, thesemiconductor core assembly 1050 may include conductive pads or othersuitable electrical contacts for interconnection with the PCB 850through the semiconductor device spacers 100.

FIGS. 11A-11E schematically illustrate top views of possiblearrangements of the semiconductor device spacers 100 when coupled to atleast a single device, such as the PCB 850, according to thedescriptions of FIGS. 8-10 above. Generally, the semiconductor devicespacers 100 may be disposed between adjacent PCB's or other devices inany suitable quantity and arrangement. As depicted in FIG. 11A, twosemiconductor device spacers 100 are disposed on a top surface of thePCB 850 along edges of opposing ends thereof. FIG. 11B illustrates threesemiconductor device spacers 100 disposed along three edges of the topsurface of PCB 850 and FIG. 11C illustrates four semiconductor devicespacers 100 disposed along all four edges of the top surface of PCB 850.In an alternative example, FIG. 11D illustrates a single semiconductordevice spacer 100 medially disposed along the top surface of the PCB 850and extending from one edge to an opposing edge thereof.

FIGS. 11A-11D depict exemplary arrangements wherein one or moresemiconductor device spacers 100 have a lateral dimension spanning thelength of one or more edges (e.g., sides) of an adjacent device. FIG.11E depicts an alternative exemplary arrangement wherein one or moresemiconductor device spacers 100 have dimensions less than the lengthsof the sides of the adjacent device. As shown in FIG. 11E, twosemiconductor device spacers 100 are medially disposed along the topsurface of the PCB 850, each semiconductor device spacer 100 having alateral dimensions substantially less than lengths of the sides of PCB850. In some embodiments, the ratio of area of the semiconductor devicespacers 100 relative to the area of the PCB 850 is between about 0.01and about 0.99, such as between about 0.05 and about 0.95. For example,the ratio of area of the semiconductor device spacers 100 relative tothe area of the PCB 850 is between about 0.1 and about 0.9, such asbetween about 0.15 and about 0.85.

The utilization of the semiconductor device spacers 100 in theembodiments shown above provides multiple advantages over the spacersutilized in conventional stacked package, PCB, and chip carrierstructures. Such benefits include improved thermal management forimproved electrical performance and reliability of stacked devicearchitectures. The improved thermal conductivity of these spacers, aswell as the ability to pattern fine features therein, further enablesthin-form-factor structures with greater I/O scaling to meet theever-increasing bandwidth and power efficiency demands of artificialintelligence (AI) and high performance computing (HPC). Additionally,the fabrication methods for the semiconductor device spacers describedherein provide high performance and flexibility for 3D integration withrelatively low manufacturing costs as compared to conventional spacerand stacking technologies.

While the foregoing is directed to embodiments of the presentdisclosure, other and further embodiments of the disclosure may bedevised without departing from the basic scope thereof, and the scopethereof is determined by the claims that follow.

What is claimed is:
 1. A semiconductor device assembly, comprising: asemiconductor core structure, comprising: a silicon core comprising afirst core surface opposite a second core surface, the silicon corefurther comprising first via formed therein, the first via comprising afirst via surface that defines a first opening extending through thesilicon core from the first core surface to the second core surface; aninsulating layer disposed over the first core surface, the second coresurface, and the first via surface; and an electrical interconnectionformed within the first via, the insulating layer disposed between theelectrical interconnection and the via surface; and a device spacercomprising: a frame having a first frame surface opposite a second framesurface, the frame further comprising: a frame material that comprises apolymer-based dielectric material having ceramic filler particles; and asecond via comprising a second via surface that defines a second openingextending through the frame from the first frame surface to the secondframe surface; an electrical interconnection disposed within the secondvia, the electrical interconnection disposed on the second via surface;and a barrier layer lining the second via surface and disposed betweenthe second via surface and the electrical interconnection.
 2. Thesemiconductor device assembly of claim 1, wherein the barrier layercomprises molybdenum.
 3. The semiconductor device assembly of claim 1,wherein the insulating layer comprises an epoxy resin material.
 4. Thesemiconductor device assembly of claim 1, further comprising: apassivating layer disposed between the silicon core and the insulatinglayer, the passivating layer comprising an oxide material.
 5. Thesemiconductor device assembly of claim 1, wherein the ceramic fillerparticles comprise silica particles having a maximum diameter of about0.6 μm.
 6. The semiconductor device assembly of claim 5, wherein apacking density of the silica particles is between about 0.5 and about0.95 by volume.
 7. The semiconductor device assembly of claim 1, whereinthe second via is tapered from a first diameter to a second diameter. 8.The semiconductor device assembly of claim 7, wherein the first diameteris between about 10 μm and about 100 μm, and the second diameter isbetween about 10 μm and about 150 μm.